IP Library Granted Patent US 6,573,015
Granted Patent Utility
US 6,573,015 · App. 10/255,700

Method of measuring optical aberration

Inventor: Masashi Fujimoto
Patented Case View Patent ↗
Granted: Jun 3, 2003 Filed: Sep 27, 2002
Inventor
Masashi Fujimoto
Assignee (at issue)
NEC Electronics Corporation

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Quick Facts
Patent No.
US 6,573,015
App. No.
10/255,700
Filed
2002-09-27
Granted
2003-06-03
Kind
B2