Granted Patent
Utility
US 6,573,133 · App. 09/848,278
Method of forming spacers in CMOS devices
Inventors:
Marc Roy, Manon Daigle, Bruno Lessard, Ginette Couture
Patented Case
View Patent ↗
Granted: Jun 3, 2003
Filed: May 4, 2001
Inventors
Marc Roy
Manon Daigle
Bruno Lessard
Ginette Couture
Assignee (at issue)
DALSA Semiconductor Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.