Granted Patent
Utility
US 6,573,141 · App. 09/267,327
In-situ etch and pre-clean for high quality thin oxides
Inventors:
Bernice L. Kickel, John Smythe
Patented Case
View Patent ↗
Granted: Jun 3, 2003
Filed: Mar 12, 1999
Inventors
Bernice L. Kickel
John Smythe
Assignee (at issue)
Zilog, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.