Granted Patent
Utility
US 6,573,175 · App. 09/998,729
Dry low k film application for interlevel dielectric and method of cleaning etched features
Inventors:
Zhiping Yin, Gary Chen
Patented Case
View Patent ↗
Granted: Jun 3, 2003
Filed: Nov 30, 2001
Inventors
Zhiping Yin
Gary Chen
Assignee (at issue)
Micron Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.