Granted Patent
Utility
US 6,573,178 · App. 09/556,160
Manufacturing method for semiconductor device and semiconductor manufacturing apparatus
Inventor:
Iwao Nakamura
Patented Case
View Patent ↗
Granted: Jun 3, 2003
Filed: Apr 21, 2000
Inventor
Iwao Nakamura
Assignee (at issue)
KOKUSAI ELECTRIC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.