Granted Patent
Utility
US 6,573,552 · App. 09/514,747
Method to form hemispherical grained polysilicon
Inventor:
Randhir P. S. Thakur
Patented Case
View Patent ↗
Granted: Jun 3, 2003
Filed: Feb 28, 2000
Inventor
Randhir P. S. Thakur
Assignee (at issue)
Micron Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.