Granted Patent
Utility
US 6,573,993 · App. 10/206,042
Apparatus and method for feature edge detection in semiconductor processing
Inventor:
Joseph R. Little
Patented Case
View Patent ↗
Granted: Jun 3, 2003
Filed: Jul 29, 2002
Inventor
Joseph R. Little
Assignee (at issue)
Micron Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.