Granted Patent
Utility
US 6,573,997 · App. 09/617,719
Hybrid shearing and phase-shifting point diffraction interferometer
Inventors:
Kenneth Alan Goldberg, Patrick P. Naulleau
Patented Case
View Patent ↗
Granted: Jun 3, 2003
Filed: Jul 17, 2000
Inventors
Kenneth Alan Goldberg
Patrick P. Naulleau
Assignee (at issue)
California
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.