Granted Patent
Utility
US 6,576,053 · App. 09/679,559
Method of forming thin film using atomic layer deposition method
Inventors:
Yeong-kwan Kim, Young-Wook Park, Jae-Soon Lim, Sung-Je Choi, Sang In Lee
Patented Case
View Patent ↗
Granted: Jun 10, 2003
Filed: Oct 6, 2000
Inventors
Yeong-kwan Kim
Young-Wook Park
Jae-Soon Lim
Sung-Je Choi
Sang In Lee
Assignee (at issue)
SAMSUNG DISPLAY CO., LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.