Granted Patent
Utility
US 6,576,060 · App. 09/574,826
Protective gas shield apparatus
Inventors:
D. Neil Stoddard, Soon Yuh
Patented Case
View Patent ↗
Granted: Jun 10, 2003
Filed: May 19, 2000
Inventors
D. Neil Stoddard
Soon Yuh
Assignee (at issue)
ASML US, LLC
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.