Granted Patent
Utility
US 6,576,063 · App. 09/768,663
Apparatus and method for use in manufacturing a semiconductor device
Inventors:
Kazuyuki Toyoda, Osamu Kasahara, Tsutomu Tanaka, Mamoru Sueyoshi, Nobuhito Shima, Masanori Sakai
Patented Case
View Patent ↗
Granted: Jun 10, 2003
Filed: Jan 24, 2001
Inventors
Kazuyuki Toyoda
Osamu Kasahara
Tsutomu Tanaka
Mamoru Sueyoshi
Nobuhito Shima
Masanori Sakai
Assignee (at issue)
Hitachi Kokusai Electric Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.