Granted Patent
Utility
US 6,576,064 · App. 08/891,304
Support apparatus for semiconductor wafer processing
Inventors:
Stewart Griffiths, Robert H. Nilson, Kenneth Torres
Patented Case
View Patent ↗
Granted: Jun 10, 2003
Filed: Jul 10, 1997
Inventors
Stewart Griffiths
Robert H. Nilson
Kenneth Torres
Assignee (at issue)
Sandia Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.