Granted Patent
Utility
US 6,576,152 · App. 09/899,548
Dry etching method
Inventor:
Tetsuya Matsutani
Patented Case
View Patent ↗
Granted: Jun 10, 2003
Filed: Jul 6, 2001
Inventor
Tetsuya Matsutani
Assignee (at issue)
SUMITOMO ELECTRIC INDUSTRIES, LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.