Granted Patent
Utility
US 6,576,394 · App. 09/596,098
Negative-acting chemically amplified photoresist composition
Inventors:
Pingyong Xu, Ping-Hung Lu, Ralph R. Dammel
Patented Case
View Patent ↗
Granted: Jun 10, 2003
Filed: Jun 16, 2000
Inventors
Pingyong Xu
Ping-Hung Lu
Ralph R. Dammel
Assignee (at issue)
Clariant Finance (BVI) Limited
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.