Granted Patent
Utility
US 6,576,405 · App. 09/346,246
High aspect ratio photolithographic method for high energy implantation
Inventors:
Stephen J. Buffat, Jean L. Adams
Patented Case
View Patent ↗
Granted: Jun 10, 2003
Filed: Jul 1, 1999
Inventors
Stephen J. Buffat
Jean L. Adams
Assignee (at issue)
Zilog, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.