Granted Patent
Utility
US 6,576,406 · App. 09/606,815
Micro-lithographic method and apparatus using three-dimensional mask
Inventors:
Stephen C. Jacobsen, David L. Wells
Patented Case
View Patent ↗
Granted: Jun 10, 2003
Filed: Jun 29, 2000
Inventors
Stephen C. Jacobsen
David L. Wells
Assignee (at issue)
Sarcos Investments LC
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.