Granted Patent
Utility
US 6,576,481 · App. 09/962,112
Method of manufacturing semiconductor devices
Inventors:
Hideharu Itatani, Masayuki Tsuneda, Atsushi Sano, Tsukasa Ohoka
Patented Case
View Patent ↗
Granted: Jun 10, 2003
Filed: Sep 26, 2001
Inventors
Hideharu Itatani
Masayuki Tsuneda
Atsushi Sano
Tsukasa Ohoka
Assignee (at issue)
Hitachi Kokusai Electric Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.