Granted Patent
Utility
US 6,576,509 · App. 09/639,305
Semiconductor integrated circuit device and method of manufacturing the same
Inventors:
Shigeya Toyokawa, Takashi Hashimoto, Kenichi Kuroda, Shoji Yoshida, Toshiyuki Iwaki, Masamichi Matsuoka
Patented Case
View Patent ↗
Granted: Jun 10, 2003
Filed: Aug 16, 2000
Inventors
Shigeya Toyokawa
Takashi Hashimoto
Kenichi Kuroda
Shoji Yoshida
Toshiyuki Iwaki
Masamichi Matsuoka
Assignees (at issue)
HITACHI, LTD.
Hitachi ULSI Engineering Systems Co., Ltd.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.