Granted Patent
Utility
US 6,576,520 · App. 10/040,984
Amorphous carbon layer for improved adhesion of photoresist and method of fabrication
Inventors:
David Mancini, Steven M. Smith, Douglas J. Resnick
Patented Case
View Patent ↗
Granted: Jun 10, 2003
Filed: Jan 7, 2002
Inventors
David Mancini
Steven M. Smith
Douglas J. Resnick
Assignee (at issue)
Motorola, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.