Granted Patent
Utility
US 6,576,561 · App. 10/165,261
Gas assisted method for applying resist stripper and gas-resist stripper combinations
Inventor:
Terry L. Gilton
Patented Case
View Patent ↗
Granted: Jun 10, 2003
Filed: Jun 6, 2002
Inventor
Terry L. Gilton
Assignee (at issue)
Micron Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.