Granted Patent
Utility
US 6,576,565 · App. 10/075,152
RTCVD process and reactor for improved conformality and step-coverage
Inventors:
Ashima B. Chakravarti, Oleg Gluschenkov, Irene McStay
Patented Case
View Patent ↗
Granted: Jun 10, 2003
Filed: Feb 14, 2002
Inventors
Ashima B. Chakravarti
Oleg Gluschenkov
Irene McStay
Assignees (at issue)
Infineon Technologies AG
International Business Machines Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.