Granted Patent
Utility
US 6,576,912 · App. 09/752,818
Lithographic projection apparatus equipped with extreme ultraviolet window serving simultaneously as vacuum window
Inventors:
Hugo Matthieu Visser, Richard L. Sandstrom, Theodorus Hubertus Josephus Bisschops, Vadim Yevgenyevich Banine, Jeroen Jonkers
Patented Case
View Patent ↗
Granted: Jun 10, 2003
Filed: Jan 3, 2001
Inventors
Hugo Matthieu Visser
Richard L. Sandstrom
Theodorus Hubertus Josephus Bisschops
Vadim Yevgenyevich Banine
Jeroen Jonkers
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.