Granted Patent
Utility
US 6,576,922 · App. 10/036,799
Ferroelectric capacitor plasma charging monitor
Inventors:
Shawming Ma, Guoqiang Xing, Stephen Roy Gilbert
Patented Case
View Patent ↗
Granted: Jun 10, 2003
Filed: Dec 21, 2001
Inventors
Shawming Ma
Guoqiang Xing
Stephen Roy Gilbert
Assignees (at issue)
Texas Instruments Incorporated
Agilent Technologies, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.