Granted Patent
Utility
US 6,579,153 · App. 09/756,193
Aqueous dispersion for chemical mechanical polishing and chemical mechanical polishing process
Inventors:
Kazuhito Uchikura, Masayuki Motonari, Masayuki Hattori, Nobuo Kawahashi
Patented Case
View Patent ↗
Granted: Jun 17, 2003
Filed: Jan 9, 2001
Inventors
Kazuhito Uchikura
Masayuki Motonari
Masayuki Hattori
Nobuo Kawahashi
Assignees (at issue)
JSR CORPORATION
Kabushiki Kaisha Toshiba
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.