Granted Patent
Utility
US 6,579,424 · App. 09/775,527
Method for the production of substrates, magnetron source and sputter-coating chamber
Inventors:
Bernhard Cord, Gerd Deppich, Karl-Heinz Schuller, Oliver Keitel
Patented Case
View Patent ↗
Granted: Jun 17, 2003
Filed: Feb 1, 2001
Inventors
Bernhard Cord
Gerd Deppich
Karl-Heinz Schuller
Oliver Keitel
Assignee (at issue)
Unaxis Deutschland GmbH
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.