Granted Patent
Utility
US 6,579,604 · App. 09/994,407
Method of altering and preserving the surface properties of a polishing pad and specific applications therefor
Inventors:
Yaw S. Obeng, Edward M. Yokley
Patented Case
View Patent ↗
Granted: Jun 17, 2003
Filed: Nov 27, 2001
Inventors
Yaw S. Obeng
Edward M. Yokley
Assignee (at issue)
PsiloQuest
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.