Granted Patent
Utility
US 6,579,786 · App. 09/992,977
Method for depositing a two-layer diffusion barrier
Inventors:
Sven Schmidbauer, Alexander Ruf
Patented Case
View Patent ↗
Granted: Jun 17, 2003
Filed: Nov 19, 2001
Inventors
Sven Schmidbauer
Alexander Ruf
Assignee (at issue)
Infineon Technologies AG
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.