Granted Patent
Utility
US 6,579,794 · App. 09/357,126
Tungsten layer formation method for semiconductor device and semiconductor device using the same
Inventors:
Seong-tae Oh, Kyung Tae Kim, Hong-Joo Baek, Hun KIM
Patented Case
View Patent ↗
Granted: Jun 17, 2003
Filed: Jul 20, 1999
Inventors
Seong-tae Oh
Kyung Tae Kim
Hong-Joo Baek
Hun KIM
Assignee (at issue)
SAMSUNG DISPLAY CO., LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.