Granted Patent
Utility
US 6,580,153 · App. 09/811,183
Structure for protecting a micromachine with a cavity in a UV tape
Inventors:
Thomas P. Glenn, Roy Dale Hollaway, Steven Webster
Patented Case
View Patent ↗
Granted: Jun 17, 2003
Filed: Mar 14, 2001
Inventors
Thomas P. Glenn
Roy Dale Hollaway
Steven Webster
Assignee (at issue)
Amkor Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.