IP Library Granted Patent US 6,580,198
Granted Patent Utility
US 6,580,198 · App. 09/871,814

Surface acoustic wave device having a thin metal oxide film fully covering at least the electrodes and method of fabricating same

Inventors: Masahiro Nakano, Michiyuki Nakazawa, Katsuo Sato
Patented Case View Patent ↗
Granted: Jun 17, 2003 Filed: Jun 4, 2001
Inventors
Masahiro Nakano
Michiyuki Nakazawa
Katsuo Sato
Assignee (at issue)
TDK CORPORATION

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Quick Facts
Patent No.
US 6,580,198
App. No.
09/871,814
Filed
2001-06-04
Granted
2003-06-17
Kind
B2