Granted Patent
Utility
US 6,580,554 · App. 09/974,014
Method for beam control in a scanning microscope, arrangement for beam control in a scanning microscope, and scanning microscope
Inventors:
Johann Engelhardt, Werner Knebel
Patented Case
View Patent ↗
Granted: Jun 17, 2003
Filed: Oct 10, 2001
Inventors
Johann Engelhardt
Werner Knebel
Assignee (at issue)
Leica Microsystems Heidelberg GmbH
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.