Granted Patent
Utility
US 6,582,174 · App. 09/491,491
Substrate processing apparatus and substrate processing method
Inventor:
Akinari Hayashi
Patented Case
View Patent ↗
Granted: Jun 24, 2003
Filed: Jan 25, 2000
Inventor
Akinari Hayashi
Assignee (at issue)
KOKUSAI ELECTRIC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.