Granted Patent
Utility
US 6,582,277 · App. 09/846,965
Method for controlling a process in a multi-zonal apparatus
Inventor:
Nikolay Korovin
Patented Case
View Patent ↗
Granted: Jun 24, 2003
Filed: May 1, 2001
Inventor
Nikolay Korovin
Assignee (at issue)
SpeedFam-IPEC Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.