Granted Patent
Utility
US 6,582,283 · App. 10/193,429
Polishing pads for chemical mechanical planarization
Inventors:
David B. James, Arun Vishwanathan, Lee Melbourne Cook, Peter A. Burke, David Shidner
Patented Case
View Patent ↗
Granted: Jun 24, 2003
Filed: Jul 11, 2002
Inventors
David B. James
Arun Vishwanathan
Lee Melbourne Cook
Peter A. Burke
David Shidner
Assignee (at issue)
Rodel Holdings, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.