Granted Patent
Utility
US 6,582,525 · App. 09/929,437
Methods for processing a workpiece using steam and ozone
Inventor:
Eric J. Bergman
Patented Case
View Patent ↗
Granted: Jun 24, 2003
Filed: Aug 14, 2001
Inventor
Eric J. Bergman
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.