Granted Patent
Utility
US 6,582,535 · App. 09/980,932
Tungsten target for sputtering and method for preparing thereof
Inventors:
Satoru Suzuki, Hirohito Miyashita
Patented Case
View Patent ↗
Granted: Jun 24, 2003
Filed: Dec 5, 2001
Inventors
Satoru Suzuki
Hirohito Miyashita
Assignee (at issue)
Nikko-Materials Co., Ltd.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.