Granted Patent
Utility
US 6,582,623 · App. 09/609,884
CMP composition containing silane modified abrasive particles
Inventors:
Steven Grumbine, Christopher C. Streinz, Shumin Wang
Patented Case
View Patent ↗
Granted: Jun 24, 2003
Filed: Jul 5, 2000
Inventors
Steven Grumbine
Christopher C. Streinz
Shumin Wang
Assignee (at issue)
Cabot Microelectronics Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.