Granted Patent
Utility
US 6,582,890 · App. 09/799,744
Multiple wavelength photolithography for preparing multilayer microstructures
Inventors:
Paul Dentinger, Karen Krafcik
Patented Case
View Patent ↗
Granted: Jun 24, 2003
Filed: Mar 5, 2001
Inventors
Paul Dentinger
Karen Krafcik
Assignee (at issue)
Sandia Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.