Granted Patent
Utility
US 6,582,987 · App. 10/022,093
Method of fabricating microchannel array structure embedded in silicon substrate
Inventors:
Chi Hoon Jun, Chang Auck Choi, Youn Tae Kim
Patented Case
View Patent ↗
Granted: Jun 24, 2003
Filed: Dec 14, 2001
Inventors
Chi Hoon Jun
Chang Auck Choi
Youn Tae Kim
Assignee (at issue)
ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.