Granted Patent
Utility
US 6,582,996 · App. 09/650,641
Semiconductor thin film forming method
Inventors:
Akito Hara, Nobuo Sasaki
Patented Case
View Patent ↗
Granted: Jun 24, 2003
Filed: Aug 30, 2000
Inventors
Akito Hara
Nobuo Sasaki
Assignee (at issue)
Fujitsu Limited
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.