Granted Patent
Utility
US 6,583,023 · App. 10/118,887
Method for making semiconductor integrated circuits
Inventors:
Yasuhiro Shimamoto, Hiroshi Miki, Masahiko Hiratani
Patented Case
View Patent ↗
Granted: Jun 24, 2003
Filed: Apr 10, 2002
Inventors
Yasuhiro Shimamoto
Hiroshi Miki
Masahiko Hiratani
Assignee (at issue)
HITACHI, LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.