Granted Patent
Utility
US 6,583,048 · App. 09/944,042
Organosilicon precursors for interlayer dielectric films with low dielectric constants
Inventors:
Jean Louise Vincent, Mark Leonard O'Neill, Howard Paul Withers, Jr., Scott Edward Beck, Raymond Nicholas Vrtis
Patented Case
View Patent ↗
Granted: Jun 24, 2003
Filed: Aug 31, 2001
Inventors
Jean Louise Vincent
Mark Leonard O'Neill
Howard Paul Withers, Jr.
Scott Edward Beck
Raymond Nicholas Vrtis
Assignee (at issue)
Air Products and Chemicals, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.