Granted Patent
Utility
US 6,583,055 · App. 10/057,142
Method of forming stepped contact trench for semiconductor devices
Inventor:
Chien-Lung Chu
Patented Case
View Patent ↗
Granted: Jun 24, 2003
Filed: Jan 25, 2002
Inventor
Chien-Lung Chu
Assignee (at issue)
POWERCHIP SEMICONDUCTOR CORP.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.