Granted Patent
Utility
US 6,583,067 · App. 09/681,987
Method of avoiding dielectric layer deterioration with a low dielectric constant
Inventors:
Ting-Chang Chang, Po-Tsun Liu, Yi-Shien Mor
Patented Case
View Patent ↗
Granted: Jun 24, 2003
Filed: Jul 3, 2001
Inventors
Ting-Chang Chang
Po-Tsun Liu
Yi-Shien Mor
Assignee (at issue)
WINBOND ELECTRONICS CORP.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.