IP Library › Granted Patent US 6,583,507
Granted Patent Utility
US 6,583,507 · App. 10/134,071

Barrier for capacitor over plug structures

Inventors: Bum Ki Moon, Nicolas Nagel, Gerhard Beitel
Patented Case View Patent ↗
Granted: Jun 24, 2003 Filed: Apr 26, 2002
Inventors
Bum Ki Moon
Nicolas Nagel
Gerhard Beitel

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Quick Facts
Patent No.
US 6,583,507
App. No.
10/134,071
Filed
2002-04-26
Granted
2003-06-24
Kind
B1