IP Library Granted Patent US 6,583,847
Granted Patent Utility
US 6,583,847 · App. 09/883,578

Self alignment of substrates by magnetic alignment

Inventors: Alessandro C. Callegari, Praveen Chaudhari, James P. Doyle, Eileen A. Galligan, James A. Lacey, Shui-Chih Lien, Sampath Purushothaman, John J. Ritsko, James J. Speidell
Patented Case View Patent ↗
Granted: Jun 24, 2003 Filed: Jun 18, 2001
Inventors
Alessandro C. Callegari
Praveen Chaudhari
James P. Doyle
Eileen A. Galligan
James A. Lacey
Shui-Chih Lien
Sampath Purushothaman
John J. Ritsko
James J. Speidell
Assignee (at issue)
International Business Machines Corporation

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Quick Facts
Patent No.
US 6,583,847
App. No.
09/883,578
Filed
2001-06-18
Granted
2003-06-24
Kind
B2