Granted Patent
Utility
US 6,585,567 · App. 09/943,719
Short CMP polish method
Inventors:
Andrew J. Black, Allison Deen
Patented Case
View Patent ↗
Granted: Jul 1, 2003
Filed: Aug 31, 2001
Inventors
Andrew J. Black
Allison Deen
Assignee (at issue)
KONINKLIJKE PHILIPS ELECTRONICS NV
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.