Granted Patent
Utility
US 6,585,907 · App. 09/839,162
Method for manufacturing a shield for an inductively-couple plasma apparatus
Inventors:
Eun-Hee Shin, Jin-Man Kim, Baik-Soon Choi, Hun Cha
Patented Case
View Patent ↗
Granted: Jul 1, 2003
Filed: Apr 23, 2001
Inventors
Eun-Hee Shin
Jin-Man Kim
Baik-Soon Choi
Hun Cha
Assignee (at issue)
SAMSUNG DISPLAY CO., LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.