Granted Patent
Utility
US 6,585,908 · App. 09/905,032
Shallow angle interference process and apparatus for determining real-time etching rate
Inventors:
Andre Cardoso, Alan C. Janos
Patented Case
View Patent ↗
Granted: Jul 1, 2003
Filed: Jul 13, 2001
Inventors
Andre Cardoso
Alan C. Janos
Assignee (at issue)
Axcelis Technologies, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.