Granted Patent
Utility
US 6,586,056 · App. 10/079,746
Silicon based films formed from iodosilane precursors and method of making the same
Inventors:
Barry C. Arkles, Alain E. Kaloyeros
Patented Case
View Patent ↗
Granted: Jul 1, 2003
Filed: Feb 19, 2002
Inventors
Barry C. Arkles
Alain E. Kaloyeros
Assignee (at issue)
GELEST, INC.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.